Optical scattering : measurement and analysis / John C. Stover.

Format:

Book

Author/Creator:

Stover, John C., author.

Contributor:

Society of Photo-Optical Instrumentation Engineers.

Series:

SPIE monograph ; PM224.

SPIE digital library

SPIE Press monograph ; PM224

Language:

English

Subjects (All):

Light--Scattering.

Light.

Genre:

Electronic books.

Physical Description:

1 online resource (xxiv, 302 pages) : illustrations, digital file.

Edition:

Third edition.

Place of Publication:

Bellingham, Wash. : SPIE, 2012.

System Details:

Mode of access: World Wide Web.

text file

Summary:

The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and particles as well as the use of wafer scanners to locate and size isolated surface features. New sections cover the multimillion-dollar wafer scanner business, establishing that microroughness is the noise, not the signal, in these systems. Scatter measurements, now routinely used to determine whether small-surface features are pits or particles and inspiring new technology that provides information on particle material, are also discussed. These new capabilities are now supported by a series of international standards, and a new chapter reviews those documents. New information on scatter from optically rough surfaces has also been added. Once the critical limit is exceeded, scatter cannot be used to determine surface-roughness statistics, but considerable information can still be obtained - especially when measurements are made on mass-produced products. Changes in measurement are covered, and the reader will find examples of scatter measurements made using a camera for a fraction of the cost and in a fraction of the time previously possible. The idea of relating scatter to surface appearance is also discussed, and appearance has its own short chapter. After all, beauty is in the eye of the beholder, and what we see is scattered light.

Contents:

Preface to the first edition

Preface to the second edition

Acknowledgments for the second edition

Preface to the third edition

Acknowledgments for the third edition

List of acronyms

Chapter 1. Quantifying light scatter

Chapter 2. Quantifying surface roughness

Chapter 3. Scatter calculations and diffraction theory

Chapter 4. Using Rayleigh-Rice to calculate smooth-surface statistics from the BRDF

Chapter 5. Polarization of scattered light

Chapter 6. Scattering models for discrete surface features

Chapter 7. Instrumentation and measurement issues

Chapter 8. Predicting scatter from roughness

Chapter 9. Detection of discrete defects

Chapter 10. Appearance and scattered light

Chapter 11. Industrial applications

Chapter 12. Published scatter standards

Chapter 13. Scatter specifications

Appendix A. Review of electromagnetic wave propagation

Appendix B. Kirchhoff diffraction from sinusoidal gratings

Appendix C. BSDF data

Appendix D. Units

References

Works consulted.

Notes:

"SPIE Digital Library."--Website.

Includes bibliographical references (pages 283-302).

Title from PDF title page (SPIE eBooks Website, viewed 2012-08-07).

Other Format:

Print version:

ISBN:

9780819492524

OCLC:

805233701

Access Restriction:

Restricted for use by site license.