Process Variations in Microsystems Manufacturing / by Michael Huff.

Format:

Book

Author/Creator:

Huff, Michael, Jr., 1740 or 1741-1818, author.

Contributor:

SpringerLink (Online service)

Series:

Engineering (Springer-11647)

Microsystems and nanosystems 2198-0063

Microsystems and Nanosystems, 2198-0063

Language:

English

Subjects (All):

Nanotechnology.

Manufactures.

Electronic circuits.

Nanotechnology and Microengineering.

Manufacturing, Machines, Tools, Processes.

Circuits and Systems.

Local Subjects:

Nanotechnology and Microengineering.

Manufacturing, Machines, Tools, Processes.

Nanotechnology.

Circuits and Systems.

Physical Description:

1 online resource (XIX, 521 pages) : 236 illustrations, 24 illustrations in color.

Edition:

First edition 2020.

Contained In:

Springer eBooks

Place of Publication:

Cham : Springer International Publishing : Imprint: Springer, 2020.

System Details:

text file PDF

Summary:

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations.

Contents:

Introduction

Overview of Microsystems Manufacturing

Process Variations in Microsystems Processing Steps

Microsystems Metrology Methods and Associated Errors

Process Integration and Variations in Material Properties

Device Parameter Variations in Microsystems Manufacturing

Quality Assurance and Control Methods Used in Microsystems Manufacturing

Design Methods for Handling Process Variations

Future Methods for Improved Microsystems Manufacturing Process Variations.

Other Format:

Printed edition:

ISBN:

978-3-030-40560-1

9783030405601

Access Restriction:

Restricted for use by site license.