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Theoretical studies of processes of deposition of silicon dioxide thin films on silicon wafers, an experimental apparatus.
LIBRA TK7835 .B63
Available from offsite location
LIBRA 378.748 POS1969.62
Available from offsite location
- Format:
- Book
- Manuscript
- Thesis/Dissertation
- Author/Creator:
- Bobin, Georges Jean.
- Language:
- English
- Subjects (All):
- Penn theses--Engineering.
- Engineering--Penn theses.
- Local Subjects:
- Penn theses--Engineering.
- Engineering--Penn theses.
- Physical Description:
- v, 63 numbered l. : illustrations ; 29 cm
- Production:
- [Philadelphia], 1969.
- Notes:
- Thesis (M.S. in Engineering)--Graduate School of Arts and Sciences, University of Pennsylvania, 1969.
- Bibliography: l. 62-63.
- OCLC:
- 244979465
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