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Micro and nano machined electrometers / Yong Zhu, editor.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Electrometer.
- Electronic circuits.
- Nanotechnology.
- Physical Description:
- v, 220 pages : illustrations (some color) ; 24 cm
- Place of Publication:
- Singapore : Springer, 2020.
- Summary:
- This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
- Contents:
- Introduction
- Noises in electrometers
- Commercial solid-state electrometer
- Mesoscopic SET electrometer
- NEMS based resonant electrometer
- MEMS based resonant electrometer
- Vibrating-reed electrometer
- Electrometer applications.
- Notes:
- Includes bibliographical references.
- ISBN:
- 9811332460
- 9789811332463
- OCLC:
- 1057655925
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