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Principles of lithography / Harry J. Levinson.
- Format:
- Book
- Author/Creator:
- Levinson, Harry J.
- Series:
- SPIE Press monograph ; PM198.
- Press monograph ; 198
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction.
- Integrated circuits.
- Microlithography.
- Physical Description:
- 1 online resource (525 p.)
- Edition:
- 3rd ed.
- Place of Publication:
- Bellingham, Wash. : SPIE Press, c2010.
- Language Note:
- English
- Summary:
- The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
- Contents:
- Preface to the third edition
- Preface to the second edition
- Preface
- Chapter 1. Overview of lithography
- Chapter 2. Optical pattern formation
- Chapter 3. Photoresists
- Chapter 4. Modeling and thin-film effects
- Chapter 5. Wafer steppers
- Chapter 6. Overlay
- Chapter 7. Masks and reticles
- Chapter 8. Confronting the diffraction limit
- Chapter 9. Metrology
- Chapter 10. Immersion lithography and the limits of optical lithography
- Chapter 11. Lithography costs
- Chapter 12. Extreme ultraviolet lithography
- Chapter 13. Alternative lithography techniques
- Appendix A: Coherence.
- Notes:
- Description based upon print version of record.
- Title from PDF title page (SPIE eBooks Web site, viewed Oct. 22, 2010).
- Includes bibliographical references and index.
- ISBN:
- 1-5231-3206-X
- 1-68015-099-5
- 0-8194-8325-7
- OCLC:
- 746472242
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