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Micro-Nano-Integration : 7th GMM-Workshop : 22-23 October 2018, Dortmund, Germany / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author.
- Language:
- German
- Subjects (All):
- Nanostructures--Congresses.
- Nanostructures.
- Microelectronics--Congresses.
- Microelectronics.
- Physical Description:
- 1 online resource (218 pages)
- Place of Publication:
- Berlin, Germany : VDE Verlag, 2018.
- Notes:
- Description based on: online resource; title from title screen (IEEE Xplore, viewed May 23, 2020).
- ISBN:
- 1-5231-2672-8
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