Chemical vapor deposition for nanotechnology / Pietro Mandracci, editor.

Format:

Book

Author/Creator:

Pietro Mandracci

Contributor:

Mandracci, Pietro, editor.

Language:

English

Subjects (All):

Chemical vapor deposition.

Physical Description:

1 online resource (164 pages) : illustrations

Edition:

1st ed.

Place of Publication:

IntechOpen 2019

[Place of publication not identified] : IntechOpen, [2019]

Language Note:

English

Summary:

Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.

Contents:

Chemical vapor deposition

Contents

Preface

Section 1 CVD Fundamentals

Chapter 1 Spatial Atomic Layer Deposition

Chapter 2 Direct Liquid Injection Chemical Vapor Deposition

Section 2 CVD of Thin Films

Chapter 3 DLC Layers Created Using CVD Techniques and Their Application

Chapter 4 Controlled Post-treatment of Thick CVD-Diamond Coatings by High-Density Plasma Oxidation

Section 3 CVD of 2D Materials

Chapter 5 Large-Area Synthesis and Growth Mechanism of Graphene by Chemical Vapor Deposition

Chapter 6 Atmospheric Pressure Chemical Vapor Deposition of Graphene

Section 4 CVD of Nanofibers

Chapter 7 Chemical Vapor Deposition of Helical Carbon Nanofibers.

Notes:

Includes bibliographical references.

Description based on: online resource; title from PDF information screen (InTech, viewed October 15, 2022).

Description based on publisher supplied metadata and other sources.

ISBN:

9781838817329

1838817328

9781789849615

1789849616