晶圆制造自动化物料运输系统调度

Format:

• Book

Author/Creator:

• 张洁.

Contributor:

• 秦威.
• 吴立辉.

Language:

Chinese

Subjects (All):

• Production scheduling.
• Semiconductor wafers.

Physical Description:

1 online resource (272 p.)

Edition:

1st ed.

Place of Publication:

Huazhong : Huazhong University of Science and Technology Press, 2015.

Summary:

This book is a comprehensive guide focusing on the scheduling of automated material transportation systems within semiconductor wafer manufacturing. It addresses the challenges of large-scale, stochastic, real-time, and multi-objective scheduling problems. The authors delve into system modeling, optimization methods, and performance evaluation techniques, providing theoretical foundations for research institutions and industry professionals. The book is also suitable as a reference for students in mechanical engineering, industrial engineering, automation, and computer engineering. It aims to advance scheduling methods in wafer manufacturing to improve productivity and efficiency in semiconductor processes. Generated by AI.

Contents:

晶圆制 动化物料 系统 度f1; 24-晶圆制 动化 正文 ; 晶圆制 动化 前 .pdf; 正文目录.pdf; 晶圆制 动化 正文 .pdf

Notes:

• Description based upon print version of record.
• Description based on publisher supplied metadata and other sources.
• Part of the metadata in this record was created by AI, based on the text of the resource.

ISBN:

• 9787568009027
• 7568009025

OCLC:

946310448