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2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) / Institute of Electrical and Electronics Engineers (IEEE).

IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online

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Format:
Book
Author/Creator:
Institute of Electrical and Electronics Engineers (IEEE), author, issuing body.
Language:
English
Subjects (All):
Process control--Congresses.
Process control.
Semiconductor industry--Management--Congresses.
Semiconductor industry.
Physical Description:
1 online resource : illustrations
Other Title:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference
Place of Publication:
Piscataway, New Jersey : Institute of Electrical and Electronics Engineers (IEEE), 2019.
Notes:
Description based on publisher supplied metadata and other sources.
ISBN:
9781538676011
153867601X

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