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Optical MEMS and Nanophotonics (OPT MEMS), 2009 IEEE/LEOS International Conference on / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author, issuing body.
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Microelectronics--Congresses.
- Microelectronics.
- Physical Description:
- Online-Ressource (159 Seiten)
- Other Title:
- Dependable Systems and Networks Workshops
- Place of Publication:
- Clearwater, FL,USA : IEEE, 2009.
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5090-6919-4
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