1 option
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena.
AIP Journals Complete Available from 01/01/1991 volume: 9 until 11/30/2009. Available online
View online- Format:
- Journal/Periodical
- Language:
- English
- Subjects (All):
- Vacuum technology--Periodicals.
- Vacuum technology.
- Microelectronics--Periodicals.
- Microelectronics.
- Nanostructured materials--Periodicals.
- Nanostructured materials.
- Genre:
- Periodicals.
- Physical Description:
- 1 online resource
- Bimonthly
- 2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-
- Ceased in 2009?
- Other Title:
- Journal of vacuum science and technology. B, Microelectronics and nanometer structures
- Some providers have journal homepage title: Journal of vacuum science and technology. B. Online
- Microelectronics and nanometer structures
- Also known as: JVST B
- $I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology. B, An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena
- Continues:
- Journal of Vacuum Science & Technology B: Microelectronics processing and phenomena
- Continued By:
- Journal of Vacuum Science & Technology B
- Place of Publication:
- Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
- System Details:
- Mode of access: World Wide Web.
- Notes:
- Refereed/Peer-reviewed
- Published: Melville, NY., 2003-
- Title from issue HTML table of contents (Scitation site, viewed Sept. 21, 2006).
- "An official publication of the American Vacuum Society."
- Issued also in print format and on CD-ROM under the title: JVST. A & B.
- Latest issue consulted: Vol. 24, no. 4 (Jul./Aug. 2006) (viewed Sept. 21, 2006).
- ISSN:
- 1520-8567
- OCLC:
- 37329836
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