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Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
AIP Journals Complete Available from 01/01/1983 volume: 1 until 11/30/1990. Available online
View onlineAVS Digital Archive Available from 01/01/1983 issue: 1 until 11/30/1990. Available online
View online- Format:
- Journal/Periodical
- Standardized Title:
- Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
- Language:
- English
- Subjects (All):
- Vacuum technology--Periodicals.
- Vacuum technology.
- Microelectronics--Periodicals.
- Microelectronics.
- Genre:
- Periodicals.
- Physical Description:
- Bimonthly, 1985-1990
- 2nd ser., v. 1, no. 1 (Jan./Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
- Other Title:
- Journal of vacuum science and technology. B, Microelectronics processing and phenomena
- Microelectronics processing and phenomena
- Continues:
- Journal of Vacuum Science and Technology
- Continued By:
- Journal of Vacuum Science & Technology B
- Place of Publication:
- New York, N.Y. : by the American Institute of Physics for the AVS, ©1983-©1990.
- System Details:
- Mode of access: World Wide Web.
- Notes:
- Refereed/Peer-reviewed
- Title from PDF issue table of contents (Scitation site, viewed September 21, 2006).
- ISSN:
- 2327-9877
- OCLC:
- 71441616
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