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Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B.
- Format:
- Journal/Periodical
- Language:
- English
- Subjects (All):
- Nanotechnology--Periodicals.
- Nanotechnology.
- Microelectronics--Periodicals.
- Microelectronics.
- Genre:
- Periodicals.
- Physical Description:
- Bimonthly
- Began with 2nd ser., v. 28, no. 2 (Mar./Apr. 2010).
- Other Title:
- Nanotechnology & microelectronics
- Nanotechnology and microelectronics
- Journal of vacuum science and technology. B, International journal devoted to microelectronics and nanometer structures : processing, measurement, & phenomena
- JVST B
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- Continues:
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Place of Publication:
- New York, NY : AVS through the American Institute of Physics
- Notes:
- Refereed/Peer-reviewed
- Includes: Papers from the ... International Vacuum Nanoelectronics Conference, 2010- ; papers from the ... North American Conference on Molecular-Beam Epitaxy, 2010-
- Description based on print version record.
- ISSN:
- 2166-2754
- OCLC:
- 779189954
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