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2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014) : San Francisco, California, USA, 26-30 January 2014.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Micro Electro Mechanical Systems (27th : 2014 San Francisco, Calif.)
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Other Title:
- 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
- 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems
- Micro Electro Mechanical Systems
- Place of Publication:
- IEEE
- ISBN:
- 9781479935093
- 1479935093
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