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Ion Implantation Technology (IIT), 2014 20th International Conference on / Institute of Electrical and Electronics Engineers (IEEE).
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers (IEEE), author, issuing body.
- Language:
- English
- Subjects (All):
- Ion implantation--Congresses.
- Ion implantation.
- Semiconductors--Congresses.
- Semiconductors.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource : illustrations
- Other Title:
- 2014 20th International Conference on Ion Implantation Technology
- 2014 20th International Conference on Ion Implantation Technology (IIT)
- Ion Implantation Technology
- Place of Publication:
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers (IEEE), 2014.
- Summary:
- Annotation Ion Implantation Technology and Thermal Processing for Semiconductor Devices and Materials.
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 9781479952120
- 1479952125
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