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2016 21st International Conference on Ion Implantation Technology (IIT) / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author, issuing body.
- Language:
- English
- Subjects (All):
- Ion implantation--Congresses.
- Ion implantation.
- Physical Description:
- 1 online resource (87 pages)
- Other Title:
- 2016 21st International Conference on Ion Implantation Technology
- Place of Publication:
- Piscataway, NJ : IEEE, 2016.
- Summary:
- Annotation The conference will cover topics on ion implantation technology and thermal processing for semiconductor devices and materials including junction, contact, material modification, process modeling and metrology methods.
- Notes:
- Description based on: online resource; title from PDF information screen (IEEE Xplore Digital Library, viewed April 18, 2023).
- Includes bibliographical references and index.
- ISBN:
- 1-5090-2024-1
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