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MEMS : 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems : 22-26 January 2017.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Micro Electro Mechanical Systems (30th : 2017 : Las Vegas, Nev.)
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (459 pages)
- Place of Publication:
- New York : IEEE, 2017.
- Notes:
- Description based on: online resource; title from title screen (IEEE Xplore Digital Library, viewed March 17, 2018).
- ISBN:
- 1-5090-5078-7
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