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Ionized-Cluster Beam Deposition and Epitaxy
- Format:
- Book
- Author/Creator:
- Takagi, Toshinori, Author.
- Language:
- English
- Subjects (All):
- Thin film devices--Design and construction.
- Thin film devices.
- Epitaxy.
- Place of Publication:
- [Place of publication not identified] Noyes Publications Imprint 1989
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 0-8155-1817-X
- 1-59124-107-3
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