Micro mechanical systems : principles and technology / edited by T. Fukuda and W. Menz.

Format:

Book

Contributor:

Fukuda, T. (Toshio), 1948-

Menz, W. (Wolfgang)

Series:

Handbook of sensors and actuators ; 6.

Handbook of sensors and actuators ; 6

Language:

English

Subjects (All):

Microelectromechanical systems--Handbooks, manuals, etc.

Microelectromechanical systems.

Microtechnology--Handbooks, manuals, etc.

Microtechnology.

Physical Description:

1 online resource (278 p.)

Place of Publication:

Amsterdam ; New York : Elsevier, 1998.

Language Note:

English

Summary:

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four dis

Contents:

Front Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool Preparation

Wire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology - Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven Actuators

Piezoelectric Actuators Mechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete Microsystem

The Industrial Potential of Microsystem Technology The Importance of Standardization; Outlook

Notes:

Description based upon print version of record.

Includes bibliographical references.

ISBN:

1-282-28497-5

9786612284977

0-08-053654-9

OCLC:

183633551