Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes / Min-Hang Bao.

Format:

Book

Author/Creator:

Bao, Min-Hang.

Series:

Handbook of sensors and actuators ; v. 8.

Handbook of sensors and actuators ; v. 8

Language:

English

Subjects (All):

Transducers--Handbooks, manuals, etc.

Transducers.

Microelectromechanical systems--Handbooks, manuals, etc.

Microelectromechanical systems.

Physical Description:

1 online resource (393 p.)

Edition:

1st ed.

Place of Publication:

Amsterdam ; New York : Elsevier, 2000.

Language Note:

English

Summary:

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial a

Contents:

Cover; Contents; Preface; Chapter 1. Introduction to micro mechanical transducers; 1.1. Piezoresistive pressure sensors; 1.2. Piezoresistive accelerometers; 1.3. Capacitive sensors; 1.4. Resonant sensors; 1.5. Vibratory gyroscopes; 1.6. Basic principles of micro mechanical transducers; References; Chapter 2. Basic mechanics of beam and diaphragm structures; 2.1. Stress and Strain; 2.2. Stress and strain of beam structures; 2.3. Vibration frequency by energy method; 2.4.Vibration frequencies of beam by differential equation method; 2.5. Damped and forced vibration

2.6. Basic mechanics of diaphragmsReferences; Chapter 3. Air damping; 3.1. Viscous flow of a fluid; 3.2. Squeeze-film air damping; 3.3. Slide-film air damping; 3.4. Damping in rare air; References; Chapter 4. Electrostatic driving and capacitive sensing; 4.1. Electrostatic force; 4.2. Displacement of elastic structures by electrostatic force; 4.3. Step and alternating driving; 4.4. Capacitive sensing; 4.5. Effects of electric driving on capacitive sensing; References; Chapter 5. Piezoresistive sensing; 5.1. Metal strain gauge; 5.2. Piezoresistive effect of silicon

5.3. Coordinate transformation of tensors of the second rank5.4. Coordinate transformation of piezoresistive coefficient; 5.5. Piezoresistive sensing elements; 5.6. Polysilicon piezoresistive sensing elements; References; Chapter 6. Piezoresistive pressure transducers; 6.1. Designs with flat diaphragms; 6.2. Pressure transducers with sculptured diaphragm structure; 6.3. Design of polysilicon pressure transducer; 6.4. Offset voltage and temperature coefficient of offset; 6.5. Temperature coefficient of sensitivity; 6.6. Nonlinearity; 6.7. Calibration of pressure transducers; References

Chapter 7. Piezoresistive accelerometers7.1. Cantilever beam accelerometers; 7.2. Quad-beam accelerometer; 7.3. Twin-mass accelerometer; 7.4. Lateral accelerometers; References; Chapter 8. Capacitive pressure transducers and accelerometers; 8.1. Capacitive pressure transducers; 8.2. Open loop capacitive accelerometers; 8.3. Force-balanced accelerometers; 8.4. Thermo-mechanical noise of mechanical structures; References; Chapter 9. Resonant sensors and vibratory gyroscopes; 9.1. Resonant pressure transducers; 9.2. Resonant accelerometers; 9.3. Vibratory gyroscopes; References; Subject index

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

ISBN:

9786611047252

9781281047250

1281047252

9780080524030

0080524036

OCLC:

192136000