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Fabrication engineering at the micro and nanoscale / Stephen A. Campbell. [electronic resource]
- Format:
- Book
- Author/Creator:
- Campbell, Stephen A., 1954-
- Series:
- The Oxford series in electrical and computer engineering
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction.
- Semiconductors.
- Physical Description:
- 1 online resource (xvi, 647 p. ) ill. ;
- Edition:
- 3rd ed.
- Place of Publication:
- New York, N.Y. : Oxford University Press, 2008.
- Language Note:
- English
- Notes:
- Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
- Includes bibliographical references and index.
- ISBN:
- 1-61344-110-X
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