1 option
Handbook of semiconductor silicon technology / edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
- Format:
- Book
- Series:
- Materials science and process technology series. Electronic materials and process technology.
- Materials science and process technology series
- Language:
- English
- Subjects (All):
- Semiconductors--Handbooks, manuals, etc.
- Semiconductors.
- Silicon crystals--Handbooks, manuals, etc.
- Silicon crystals.
- Physical Description:
- 1 online resource (816 p.)
- Place of Publication:
- Park Ridge, N.J., U.S.A. : Noyes Publications, c1990.
- Language Note:
- English
- Summary:
- This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.
- Contents:
- ""Preface""; ""Contributors""; ""Contents""; ""1 Silicon Precursors: Their Manufacture and Properties""; ""2 Polysilicon Preparation""; ""3 Crystal Growth of Silicon""; ""4 Silicon Wafer Preparation""; ""5 Silicon Epitaxy""; ""6 Silicon Material Properties""; ""7 Oxygen, Carbon and Nitrogen in Silicon""; ""8 Carrier Lifetimes in Silicon""; ""9 Preparation and Properties of Polycrystalline-Silicon Films""; ""10 Silicon Phase Diagrams""; ""Index""
- Notes:
- Description based upon print version of record.
- Includes bibliographical references and index.
- ISBN:
- 1-282-00281-3
- 9786612002816
- 0-8155-1771-8
- 1-59124-294-0
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.