A guide to hands-on MEMS design and prototyping / Joel Kubby.

Format:

Book

Author/Creator:

Kubby, Joel A., author.

Language:

English

Subjects (All):

Microelectromechanical systems.

Physical Description:

1 online resource (xi, 166 pages) : digital, PDF file(s).

Edition:

1st ed.

Other Title:

A Guide to Hands-on MEMS Design & Prototyping

Place of Publication:

Cambridge : Cambridge University Press, 2011.

Language Note:

English

Summary:

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Contents:

Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.

Notes:

Title from publisher's bibliographic system (viewed on 05 Oct 2015).

Includes bibliographical references and index.

ISBN:

1-139-12411-0

1-107-21936-1

1-283-29560-1

1-139-12216-9

9786613295606

1-139-11642-8

1-139-11206-6

0-511-98466-9

1-139-12708-X

1-139-11425-5

OCLC:

769341803