Developments in surface contamination and cleaning. Volume 8 : cleaning techniques / edited by Rajiv Kohli, K. L. Mittal.

Format:

Book

Author/Creator:

Kohli, Rajiv, 1947- author.

Contributor:

Kohli, Rajiv, editor.

Mittal, K. L., editor.

Series:

Developments in Surface Contamination and Cleaning Series ; Volume 8

Language:

English

Subjects (All):

Cleaning.

Coatings.

Particles--Measurement.

Particles.

Surface contamination--Prevention.

Surface contamination.

Surfaces (Technology)--Inspection.

Surfaces (Technology).

Physical Description:

1 online resource (235 p.)

Edition:

1st edition

Place of Publication:

Oxford, England ; Waltham, Massachusetts : William Andrew, 2015.

Language Note:

English

System Details:

text file

Summary:

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet a

Contents:

Front Cover; Developments in Surface Contamination and Cleaning: Cleaning Techniques; Copyright; Contents; Contributors; Preface; About the Editors; Chapter 1: How Green and Does it Clean: Methodologies for Assessing Cleaning Products for Safety and Performance; 1. Background; 2. Environmental Concerns; 3. Green Cleaning; 4. Regulatory Aspects; 5. Product Selection; 6. Green Assessment-What Makes a Product Green?; 6.1. Pollution Prevention Options Assessment Tool (P2OASys); 6.2. Green Screen; 6.2.1. Human Health Group I; 6.2.2. Human Health Group II and II

6.2.3. Environmental Toxicity and Fate6.2.4. Physical Hazards; 6.2.5. Green Screen Process Steps; 6.3. Environmental Protection Agency Design for the Environment; 6.3.1. Acute Mammalian Toxicity; 6.3.2. Carcinogenicity; 6.3.3. Genetic Toxicity; 6.3.4. Neurotoxicity; 6.3.5. Repeated Dose Toxicity; 6.3.6. Reproductive and Developmental Toxicity; 6.3.7. Respiratory Sensitization; 6.3.8. Skin Sensitization; 6.3.9. Environmental Toxicity and Fate; 6.3.10. Eutrophication; 6.4. Green Seal Environmental Standard for Cleaning and Degreasing Agents (GS 34); 6.4.1. Toxic Compounds

6.4.2. Carcinogens and Reproductive Toxins6.4.3. Corrosivity and Causticity; 6.4.4. Skin and Eye Irritation; 6.4.5. Flammability and Ignitability; 6.4.6. VOC Content; 6.4.7. Ozone Depletion; 6.4.8. Toxicity to Aquatic Life; 6.4.9. Aquatic Biodegradability; 6.4.10. Eutrophication; 6.4.11. Disposal; 6.4.12. Animal Testing; 6.5. Quick Guide for Tools; 7. Performance Testing/Efficacy Evaluation; 7.1. Basic Testing Process; 7.1.1. Phase I Product Selection; 7.1.2. Phase II Temperature and Concentration Studies; 7.1.3. Phase III Mechanical Energy Studies

7.1.4. Phase IV Actual Product Cleaning Studies7.1.5. Phase V Pilot Plant/Scale-Up Feasibility Studies; 7.2. Case Studies; 7.2.1. Case Study1-Shedding Some Light on Laboratory Versus Field Practices [22]; 7.2.2. Case Study2-Thinking Outside the Cable Box-Wire & Cable Company Uses Floor Stripper on Cables [23]; 7.2.3. Case Study3-A Gear Company Decides to Go all the ``Wayqueous ́ ́-Greasing the Wheels for Regulatory Change and Resis...; 7.3. Case Study Summary; 8. Summary; Appendix A. Contact Information for Cleaning Products and Suppliers

Appendix B. Contact Information for Soils and Contaminants and SuppliersReferences; References; References; References; References; Chapter 2: UV-Ozone Cleaning for Removal of Surface Contaminants; 1. Introduction; 2. Surface Contamination and Cleanliness Levels; 3. Principles of UV-Ozone Cleaning; 4. Process Variables; 4.1. UV Sources; 4.2. Distance from the Source; 4.3. Precleaning; 4.4. Types of Contaminants; 4.5. Types of Substrates; 5. Cleaning Systems; 5.1. Costs; 5.1.1. Examples of Cost Savings; 6. Advantages and Disadvantages of UV-Ozone Cleaning; 6.1. Advantages; 6.2. Disadvantages

7. Applications

Notes:

Description based upon print version of record.

Includes bibliographical references at the end of each chapters and index.

Description based on online resource; title from PDF title page (ebrary, viewed December 12, 2014).

ISBN:

0-323-31271-3