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Developments in surface contamination and cleaning. Volume 1 : fundamentals and applied aspects / edited by Rajiv Kohli and K. L. Mittal.

Knovel Chemistry & Chemical Engineering Academic Available online

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Knovel Electronics & Semiconductors Academic Available online

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Format:
Book
Author/Creator:
Kohli, Rajiv, 1947- author.
Contributor:
Kohli, Rajiv, editor.
Mittal, Kashmiri L., editor.
Series:
Developments in surface contamination and cleaning ; Volume 1.
Developments in Surface Contamination and Cleaning Series ; Volume 1
Language:
English
Subjects (All):
Surface contamination.
Surfaces (Technology).
Physical Description:
1 online resource (897 p.)
Edition:
2nd ed.
Place of Publication:
Amsterdam, [Netherlands] : William Andrew, 2016.
Language Note:
English
Summary:
Developments in Surface Contamination and Cleaning, Vol.1: Fundamentals and Applied Aspects, Second Edition, provides an excellent source of information on alternative cleaning techniques and methods for characterization of surface contamination and validation.Each volume in this series contains a particular topical focus, covering the key.
Contents:
Front Cover; Developments in Surface Contamination and Cleaning: Fundamentals and Applied Aspects; Copyright; Contents; Preface; About the Editors; Contributors; Part I: Fundamentals; Chapter 1: The Physical Nature of Very, Very Small Particles and its Impact on their Behavior; 1.1. Introduction; 1.2. The Spectrum of Aerosol Particle Sizes; 1.3. Atoms and Molecules-Concepts and Dimensions; 1.4. The Model of a Gas; 1.5. Particles and Gas Molecules; 1.6. Particle Interactions; 1.6.1. Coagulation; 1.6.2. Homogeneous Nucleation; 1.6.3. Adsorption; 1.7. Nanoparticles as Molecular Clusters
1.8. An Interaction Model for Nanometer-Sized Particles1.9. Concluding Remarks; References; Chapter 2: Transport and Deposition of Aerosol Particles; 2.1. Introduction; 2.2. Noncontinuum Considerations; 2.3. Lagrangian Particle Equation of Motion; 2.3.1. Fluid-Particle Drag Force; 2.3.1.1. Fluid-Drag Force: Assumptions and Practical Considerations; 2.3.1.1.1. Continuum Regime Limit; 2.3.1.1.2. Free Molecule Regime Limit; 2.3.2. Gravitational Force; 2.3.3. Thermophoretic Force; 2.3.3.1. Continuum Regime Limit; 2.3.3.2. Free Molecule Regime Limit; 2.3.4. Electrostatic Force
2.4. Inertial Effects2.4.1. Nondimensionalization; 2.5. Drift Velocity; 2.5.1. Gravitational Drift Velocity; 2.5.2. Thermophoretic Drift Velocity; 2.5.3. Electric Drift Velocity; 2.6. Eulerian Formulation; 2.6.1. Particle Diffusion Coefficient; 2.6.2. Nondimensional Formulation; 2.7. Particle Transport and Deposition in a Parallel Plate Reactor; 2.7.1. Fluid Transport Equations; 2.7.1.1. Flow Field in the Showerhead Holes; 2.7.1.2. Fluid Transport Between Parallel Plates; 2.7.1.3. Summary: Fluid Flow Analysis for the Parallel Plate Geometry; 2.7.2. Particle Collection Efficiency
2.7.3. Particles Entering Through the Showerhead2.7.3.1. External Force Limit; 2.7.4. Particle Traps/in Situ Nucleation; 2.7.4.1. Efficiency for the Lagrangian Formulation; 2.7.4.2. Efficiency for the Eulerian Formulation; 2.7.4.3. External Force Limit; 2.7.5. Diffusion-Enhanced Deposition from Traps or in Situ Nucleation; 2.7.5.1. Problem Definition; 2.7.5.2. Solution of the Eulerian Particle Transport Equation; 2.7.5.3. Particle Collection Efficiency; 2.7.5.4. Particle Flux; 2.7.6. Nondimensional Results; 2.7.6.1. Efficiency at Intermediate Peclet Numbers; 2.7.7. Dimensional Results
2.7.7.1. Trap Height Effects2.7.7.2. Pressure Effects; 2.7.7.3. Mass Flow Rate Effects; 2.7.7.4. Effect of Thermophoresis; 2.7.8. Summary: Diffusion-Enhanced Deposition; 2.8. Inertia-Enhanced Deposition; 2.8.1. Particle Transport in the Showerhead Holes; 2.8.2. Particle Transport Between Parallel Plates; 2.8.2.1. Asymptotic Limit of Critical Stokes Number; 2.8.3. Coupled Transport-Nondimensional Results; 2.8.3.1. Critical Stokes Numbers; 2.8.3.2. Grand Design Curves; 2.8.3.3. External Forces; 2.8.3.4. Parabolic Profile; 2.8.4. Coupled Transport-Dimensional Results
2.9. Chapter Summary and Practical Guidelines
Notes:
Description based upon print version of record.
Includes bibliographical references at the end of each chapters and index.
Description based on online resource; title from PDF title page (ebrary, viewed February 17, 2016).
Description based on publisher supplied metadata and other sources.
ISBN:
0-323-29960-1
0-323-31270-5
OCLC:
936863094

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