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Stress-induced phenomena in metallization : second international workshop, Austin, TX, March 1993
- Format:
- Book
- Series:
- AIP conference proceedings Stress-induced phenomena in metallization
- Language:
- English
- Subjects (All):
- Semiconductors--Defects--Congresses.
- Semiconductors.
- Metallic films--Defects--Congresses.
- Metallic films.
- Thin film devices--Congresses.
- Thin film devices.
- Aluminum films--Congresses.
- Aluminum films.
- Other Title:
- Stressâinduced phenomena in metallization
- Stress‐Induced Phenomena In Metallization: Second International Workshop, Volume 305
- Stress‐Induced Phenomena In Metallization
- Place of Publication:
- [Place of publication not identified] American Institute of Physics 1994
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 1-56396-251-9
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