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Stress induced phenomena in metallization : fourth international workshop, Tokyo, Japan, June, 1997

AIP Conference Proceedings (American Institute of Physics) Available online

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Format:
Book
Conference/Event
Contributor:
Okabayashi, Hidekazu, Contributor.
Ho, P. S., Contributor.
Shingūbara, Shōsō, Contributor.
Conference Name:
International Workshop on Stress-Induced Phenomena in Metallization (4th : 1997 : Tokyo, Japan)
Series:
AIP conference proceedings Stress induced phenomena in metallization
Language:
English
Subjects (All):
Integrated circuits--Defects--Congresses.
Integrated circuits.
Thin film devices--Defects--Congresses.
Thin film devices.
Electrodiffusion--Congresses.
Electrodiffusion.
Metallic films--Congresses.
Metallic films.
Electrochemical metallizing--Congresses.
Electrochemical metallizing.
Aluminum films--Congresses.
Aluminum films.
Semiconductors--Defects--Congresses.
Semiconductors.
Liquid crystal devices--Defects--Congresses.
Liquid crystal devices.
Acoustic surface wave devices--Defects--Congresses.
Acoustic surface wave devices.
Other Title:
Fourth International Workshop On Stress Induced Phenomena In Metallization, Volume 418
Place of Publication:
[Place of publication not identified] American Institute of Physics 1998
Language Note:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
ISBN:
1-56396-682-4

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