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Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998
- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.)
- Series:
- AIP conference proceedings Characterization and metrology for ULSI technology
- Language:
- English
- Subjects (All):
- Integrated circuits--Ultra large scale integration--Congresses.
- Integrated circuits.
- Integrated circuits--Ultra large scale integration--Congresses--Software.
- Other Title:
- The 1998 International Conference On Characterization And Metrology For Ulsi Technology, Volume 449
- Place of Publication:
- [Place of publication not identified] American Institute of Physics 1998
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 1-56396-753-7
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