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Stress-Induced Phenomena in Metallization: Tenth International Workshop on Stress-Induced Phenomena in Metallization

AIP Conference Proceedings (American Institute of Physics) Available online

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Format:
Book
Conference/Event
Author/Creator:
International Workshop on Stress-Induced Phenomena in Metallization, Corporate Author.
Contributor:
Ogawa, Shinichi, Contributor.
Zschech, Ehrenfried, Contributor.
Ho, P. S., Contributor.
Conference Name:
International Workshop on Stress-Induced Phenomena in Metallization (10th : 2008 : Austin, Texas)
Series:
AIP conference proceedings Stress-induced phenomena in metallization
Language:
English
Subjects (All):
Interconnects (Integrated circuit technology)--Defects--Congresses.
Interconnects (Integrated circuit technology).
Metal-metal bonds--Electric properties--Congresses.
Metal-metal bonds.
Strength of materials--Congresses.
Strength of materials.
Nanostructured materials--Congresses.
Nanostructured materials.
Semiconductors--Congresses.
Semiconductors.
Copper--Congresses.
Copper.
Other Title:
Tenth International Workshop on Stress-Induced Phenomena in Metallization
Place of Publication:
[Place of publication not identified] American Institute of Physics 2009
Language Note:
English
Contents:
Electromigration in copper interconnects
Low-K dielectrics and barrier layers
Microstructure and stress behavior of Cu structures
Chip package interaction, nanostructures and 3D interconnects.
Notes:
Bibliographic Level Mode of Issuance: Monograph
ISBN:
0-7354-0680-4

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