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Frontiers of characterization and metrology for nanoelectronics, 2011 / David G. Seiler.
- Format:
- Book
- Author/Creator:
- Seiler, David G., author.
- Language:
- English
- Subjects (All):
- Nanoelectronics--Congresses.
- Nanoelectronics.
- Physical Description:
- 1 online resource (xi, 377 pages)
- Other Title:
- Frontiers Of Characterization And Metrology For Nanoelectronics: 2011, Volume 1395
- Frontiers Of Characterization And Metrology For Nanoelectronics
- Place of Publication:
- Melville, New York : AIP Publishing, 2011.
- Summary:
- Emphasizes the frontiers of innovation in the characterization and metrology of nanoelectronics. This book comprises applications in nanoelectronic materials and devices, research and development, and manufacturing and diagnostics. It also provides a foundation for stimulating further advances in metrology and ideas for research and development.
- Contents:
- More than Moore or more Moore : a SWOT analysis / G. Dan Hutcheson and Herbert S. Bennett
- Keynote[s]
- Overviews for nanoelectronics and metrology
- Metrology for beyond CMOS
- Theory, modeling, and simulation
- Microscopy for nanoelectronics
- Novel chracterization methods
- CMOS metrology
- Interconnect metrology
- Metrology for patterning
- Next-generation defect inspection.
- Notes:
- Description based on online resource; title from PDF title page (AIP Publishing, viewed April 27, 2023).
- ISBN:
- 0-7354-0965-X
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