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Ion implantation technology 2010 : 18th International Conference on Ion Implantation Technology, IIT 2010, Kyoto, Japan, 6-11 June 2010

AIP Conference Proceedings (American Institute of Physics) Available online

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Format:
Book
Conference/Event
Author/Creator:
International Conference on Ion Implantation Technology, Corporate Author.
Contributor:
Matsuo, Jiro, Contributor.
Conference Name:
International Conference on Ion Implantation Technology (18th : 2010 : Kyoto, Japan)
International Conference on Ion Implantation Technology
Series:
AIP conference proceedings Ion implantation technology 2010
Language:
English
Subjects (All):
Ion implantation--Congresses.
Ion implantation.
Other Title:
IIT 2010
Place of Publication:
[Place of publication not identified] American Institute of Physics 2010
Language Note:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph
ISBN:
0-7354-0876-9

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