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Ion implantation technology 2012 : Proceedings of the 19th International Conference on Ion Implantation Technology / Lourdes Pelaz.
- Format:
- Book
- Author/Creator:
- Pelaz, Lourdes, author.
- Language:
- English
- Subjects (All):
- Semiconductors--Congresses.
- Semiconductors.
- Physical Description:
- 1 online resource (xiv, 446 pages)
- Other Title:
- Ion Implantation Technology 2012: Proceedings Of The 19Th International Conference On Ion Implantation Technology, Volume 1496
- Ion Implantation Technology 2012
- Place of Publication:
- Melville, New York : AIP Publishing, 2012.
- Summary:
- This conference is the premier world meeting for the presentation of the latest advances in all aspects of ion implantation, from the fundamentals of ion-solid interactions to manufacturing applications of the new machines and systems. It also offers detailed consideration of the state of the art for advanced thermal material science to advanced equipment, with emphasis on junction formation and also other novel applications.
- Contents:
- Doping Technology.- Annealing Technology.- Characterization.- Modeling and Simulation.- Advanced Equipment.
- Notes:
- Description based on online resource; title from PDF title page (AIP Publishing, viewed April 27, 2023).
- ISBN:
- 0-7354-1108-5
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