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Characterization and metrology for ULSI technology
- Format:
- Book
- Conference/Event
- Author/Creator:
- International Conference on Characterization and Metrology for ULSI Technology, Corporate Author.
- Conference Name:
- International Conference on Characterization and Metrology for ULSI Technology (2005 : Richardson, Tex.)
- International Conference on Characterization and Metrology for ULSI Technology
- Series:
- AIP conference proceedings Characterization and metrology for ULSI technology
- Language:
- English
- Subjects (All):
- Integrated circuits--Ultra large scale integration--Congresses.
- Integrated circuits.
- Integrated circuits--Ultra large scale integration--Congresses--Software.
- Other Title:
- Characterization And Metrology For Ulsi Technology 2005, Volume 788
- Place of Publication:
- [Place of publication not identified] American Institute of Physics 2005
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 0-7354-0277-9
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