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Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
- Format:
- Book
- Conference/Event
- Author/Creator:
- International Conference on Ion Implantation Technology, Corporate Author.
- Conference Name:
- International Conference on Ion Implantation Technology (16th : 2006 : Marseille, France)
- International Conference on Ion Implantation Technology
- Series:
- AIP conference proceedings Ion implantation technology
- Language:
- English
- Subjects (All):
- Semiconductors--Congresses.
- Semiconductors.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Other Title:
- IIT 2006
- Place of Publication:
- [Place of publication not identified] American Institute of Physics 2006
- Language Note:
- English
- Contents:
- Doping processes in semiconductors
- Cluster implantation in doping
- PIII and plasma doping
- Materials : novel techniques and applications
- Implant technology
- Implant technology (materials)
- Process control & yield
- Process control & yield (metrology)
- Materials.
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 0-7354-0365-1
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