Glancing angle deposition of thin films : engineering the nanoscale / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.

Format:

Book

Author/Creator:

Hawkeye, Matthew M., author.

Taschuk, Michael T., author.

Brett, Michael J., author.

Series:

Wiley series in materials for electronic and optoelectronic applications.

Wiley Series in Materials for Electronic and Optoelectronic Applications

Language:

English

Subjects (All):

Nanotechnology.

Chemical vapor deposition.

Nanoelectromechanical systems--Design and construction.

Nanoelectromechanical systems.

Physical Description:

1 online resource (316 p.)

Edition:

1st ed.

Place of Publication:

Wiley 2014

Summary:

This book provides a highly practical treatment of GLAD technology, gathering existing procedures, methodologies, and experimental designs into a single, cohesive volume which will be useful both as a ready reference for those in the field and as a definitive guide for those entering it. It covers: History and development of GLAD techniquesProperties and Characterization of GLAD fabricated filmsDesign and engineering of optical GLAD films including fabrication and testingPost-deposition processing and integrationDeposition systems for GLAD fabr

Contents:

Glancing Angle Deposition of Thin Films; Contents; Series Preface; Preface; 1 Introduction: Glancing Angle Deposition Technology; 1.1 Nanoscale engineering and glancing angle deposition; 1.2 GLAD-vantages; 1.2.1 Nanoscale morphology control; 1.2.2 Broad material compatibility; 1.2.3 Novel thin-film material properties; 1.2.4 Compatibility with standard microfabrication processes; 1.2.5 Scalable fabrication method; 1.3 The roots of glancing angle deposition: oblique deposition; 1.4 The importance of experimental calibration; 1.5 Computer simulations of glancing angle deposition growth

1.6 Major application areas in glancing angle deposition technology1.6.1 Energy and catalysis; 1.6.2 Sensing applications; 1.6.3 Optics; 1.7 Summary and outline of the book; References; 2 Engineering Film Microstructure with Glancing Angle Deposition; 2.1 Introduction; 2.2 Basics of conventional film growth; 2.2.1 Physical vapour deposition; 2.2.2 Nucleation and coalescence; 2.2.3 Column microstructure; 2.3 Glancing angle deposition technology: microstructural control via substrate motion; 2.4 Engineering film morphology with α; 2.4.1 Controlling microstructure and porosity

2.4.2 Directional column growth: column tilt β2.5 Engineering film morphology: column steering via φ rotation; 2.5.1 Controlling column architecture with φ: helical columns; 2.5.2 Controlling microstructure with rotation speed: vertical columns; 2.5.3 Continuous versus discrete substrate rotation; 2.6 Growth characteristics of glancing angle deposition technology films; 2.6.1 Evolutionary column growth; 2.6.2 Column broadening; 2.6.3 Column bifurcation; 2.6.4 Anisotropic shadowing and column fanning; 2.7 Advanced column steering algorithms; 2.7.1 β variations in zigzag microstructures

2.7.2 Spin-pause/two-phase substrate rotation: decoupling β and film density2.7.3 Phisweep motion: competition-resilient structure growth; 2.8 Additional control over film growth and structure; 2.8.1 High-temperature glancing angle deposition growth; 2.8.2 Multimaterial structures: co-deposition processes; References; 3 Creating High-Uniformity Nanostructure Arrays; 3.1 Introduction; 3.2 Seed layer design; 3.2.1 Seed spacing and seed height; 3.2.2 Seed lattice geometry; 3.2.3 Seed size; 3.2.4 Planar fill fraction; 3.2.5 Seed shape; 3.2.6 Two-dimensional shadow coverage; 3.2.7 Seed material

3.2.8 Design parameter summary3.3 Seed fabrication; 3.3.1 Conventional techniques; 3.3.2 Unconventional techniques; 3.4 Advanced control of local shadowing environment; 3.4.1 Preventing bifurcation: slow-corner motion; 3.4.2 Preventing broadening: phisweep and substrate swing; References; 4 Properties and Characterization Methods; 4.1 Introduction; 4.2 Structural analysis with electron microscopy; 4.2.1 Practical aspects; 4.2.2 Scanning electron microscope image analysis; 4.2.3 Three-dimensional column imaging: tomographic sectioning

4.2.4 Characterizing internal column structure with transmission electron microscope imaging

Notes:

Description based upon print version of record.

Includes bibliographical references at the end of each chapters and index.

Description based on print version record.

ISBN:

9781118847336

1118847334

9781118847510

1118847512

9781118847329

1118847326

OCLC:

883570105