Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].

Format:

Book

Contributor:

Brand, Oliver, editor.

Series:

Advanced micro & nanosystems.

Advanced Micro & Nanosystems

Language:

English

Subjects (All):

Microelectromechanical systems--Design and construction.

Microelectromechanical systems.

Microfabrication.

Resonance.

Physical Description:

1 online resource (512 p.)

Edition:

1st ed.

Place of Publication:

Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.

Language Note:

English

Summary:

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid p

Contents:

Cover; Title Page; Copyright; Contents; Series editor's preface; Preface; About the Volume Editors; List of Contributors; Part I: Fundamentals; Chapter 1 Fundamental Theory of Resonant MEMS Devices; 1.1 Introduction; 1.2 Nomenclature; 1.3 Single-Degree-of-Freedom (SDOF) Systems; 1.3.1 Free Vibration; 1.3.2 Harmonically Forced Vibration; 1.3.3 Contributions to Quality Factor from Multiple Sources; 1.4 Continuous Systems Modeling: Microcantilever Beam Example; 1.4.1 Modeling Assumptions; 1.4.2 Boundary Value Problem for a Vibrating Microcantilever

1.5.3 Transverse Deflection of 1D Membrane Structures (""Strings"")1.5.4 Transverse Deflection of 2D Membrane Structures: Circular and Square Membranes under Uniform Tension and Supported along Periphery; 1.5.5 In-Plane Deformation of Slender Circular Rings; 1.5.5.1 Extensional Modes; 1.5.5.2 In-Plane Bending Modes; 1.6 Summary; Acknowledgment; References; Chapter 2 Frequency Response of Cantilever Beams Immersed in Viscous Fluids; 2.1 Introduction; 2.2 Low Order Modes; 2.2.1 Flexural Oscillation; 2.2.2 Torsional Oscillation; 2.2.3 In-Plane Flexural Oscillation; 2.2.4 Extensional Oscillation

2.3 Arbitrary Mode Order2.3.1 Incompressible Flows; 2.3.2 Compressible Flows; 2.3.2.1 Scaling Analysis; 2.3.2.2 Numerical Results; References; Chapter 3 Damping in Resonant MEMS; 3.1 Introduction; 3.2 Air Damping; 3.3 Surface Damping; 3.4 Anchor Damping; 3.5 Electrical Damping; 3.6 Thermoelastic Dissipation (TED); 3.7 Akhiezer Effect (AKE); References; Chapter 4 Parametrically Excited Micro- and Nanosystems; 4.1 Introduction; 4.2 Sources of Parametric Excitation in MEMS and NEMS; 4.2.1 Parametric Excitation via Electrostatic Transduction; 4.2.2 Other Sources of Parametric Excitation

4.3 Modeling the Underlying Dynamics-Variants of the Mathieu Equation4.4 Perturbation Analysis; 4.5 Linear, Steady-State Behaviors; 4.6 Sources of Nonlinearity and Nonlinear Steady-State Behaviors; 4.7 Complex Dynamics in Parametrically Excited Micro/Nanosystems; 4.8 Combined Parametric and Direct Excitations; 4.9 Select Applications; 4.9.1 Resonant Mass Sensing; 4.9.2 Inertial Sensing; 4.9.3 Micromirror Actuation; 4.9.4 Bifurcation Control; 4.10 Some Parting Thoughts; Acknowledgment; References; Chapter 5 Finite Element Modeling of Resonators; 5.1 Introduction to Finite Element Analysis

5.1.1 Mathematical Fundamentals

Notes:

Description based upon print version of record.

Includes bibliographical references at the end of each chapters and index.

Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015).

ISBN:

9783527676330

3527676333

9783527676354

352767635X

OCLC:

908512576