Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems

Format:

Book

Author/Creator:

Baltes, H. (Henry)

Contributor:

Brand, Oliver, 1964-

Fedder, G. K. (Gary K.)

Hierold, Christofer.

Korvink, J. G. (Jan G.)

Tabata, Osamu, 1956-

Language:

English

Subjects (All):

Nanotechnology.

Local Subjects:

Nanotechnology.

Physical Description:

1 online resource (442 p.)

Edition:

1st ed.

Place of Publication:

Hoboken : Wiley, 2013.

Language Note:

English

Summary:

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scann

Contents:

Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics - Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review

11 CMOS-based DNA Sensor ArraysSubject Index

Notes:

Description based upon print version of record.

ISBN:

1-281-84297-4

9786611842970

3-527-61670-5

3-527-61692-6

OCLC:

214281565