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Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
- Format:
- Book
- Author/Creator:
- Ree, Moonhor.
- Series:
- Nanotechnology science and technology series.
- Nanotechnology science and technology
- Language:
- English
- Subjects (All):
- Dielectric films.
- Microelectronics--Materials.
- Microelectronics.
- Porous materials.
- Interconnects (Integrated circuit technology).
- Physical Description:
- 1 online resource (77 p.)
- Edition:
- 1st ed.
- Place of Publication:
- Hauppauge, N.Y. : Nova Science Publishers, c2010.
- Language Note:
- English
- Summary:
- The use of low dielectric constant (low-k) interdielectrics in multilevel structure integrated circuits (ICs) can lower line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines. Because of these merits, low-k interdielectric materials are currently in high demand in the development of advanced ICs. One important approach to obtaining low-k values is the incorporation of nanopores into dielectrics. This book provides an overview of the methodologies and characterisation techniques used for investigating low-k nanoporous interdielectrics.
- Contents:
- Intro
- LOW-K NANOPOROUS INTERDIELECTRICS: MATERIALS, THIN FILM FABRICATIONS, STRUCTURES AND PROPERTIES
- CONTENTS
- PREFACE
- Chapter I INTRODUCTION
- Chapter II RECENT DEVELOPMENTS IN LOW-K NANOPOROUS DIELECTRICS
- II-1. HOLLOW NANOPARTICLES
- II-2. DENDRIMERS
- II-3. STAR-SHAPE POLYMERS
- II-4. HYPERBRANCHED POLYMERS
- II-5. CROSSLINKED POLYMER NANOPARTICLES
- II-6. CORE-CORONA POLYMER NANOPARTICLES
- II-7. LINEAR POLYMERS
- II-8. CAGE SUPRAMOLECULES
- II-9. HIGH BOILING POINT MOLECULES
- II-10. HYBRID COPOLYMERS
- Chapter III CHARACTERIZATION OF PORE STRUCTURES
- III-1. GIXS
- III-2. TRANSMISSION RADIATION SCATTERING
- III-3. MICROSCOPY
- III-4. POROSIMETRY
- III-5. SPECTROSCOPY
- III-6. COMPARITIVE STUDIES OF CHARACTERIZATION OF PORE STRUCTURE
- Chapter IV CONCLUSIONS
- REFERENCES
- INDEX
- Blank Page.
- Notes:
- Description based upon print version of record.
- Includes bibliographical references (p. [51]-61) and index.
- Description based on print version record.
- ISBN:
- 1-61728-318-5
- OCLC:
- 923662443
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