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Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.
- Format:
- Book
- Series:
- Advanced materials research ; Volume 901.
- Advanced Materials Research, 1662-8985 ; Volume 901
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Nanotechnology--Congresses.
- Nanotechnology.
- Physical Description:
- 1 online resource (117 p.)
- Edition:
- 1st ed.
- Place of Publication:
- Zurich, Switzerland : TTP, 2014.
- Language Note:
- English
- Summary:
- Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production
- Contents:
- Material Science and MEMS Production; Preface and Organizing Committee; Table of Contents; Chapter 1: Materials Science, Processing and Application; Surface Effects on the Buckling of Nanowires Based on Modified Core-Shell Model; A Comparison Study of Fire Resistance of High Strength Structural Steels According to Boundary Condition; TMAH Etching of Silicon Wafer for Detector Fabrication; Phase-Shifted Bragg Gratings Based on Hybrid Plasmonics Structure; Surface Enhanced Raman Scattering Based on Dielectric-Loaded Surface Plasmon Polariton Waveguides
- A Novel System for Fine Particle Concentration MeasurementPolymerization of Acrylamide Photo Initiated by Ferroferric Oxide Nanoparticles; The Drug Loading Thermodynamics Mechanism of Eight Cationic Drugs' Adsorption onto Ion Exchange Fiber; Removal of Heavy Metal Ions with Hacac-Silica; Investigation of Room Temperature Photoluminescence of ZnO Films Induced by Different Laser Fluence Irradiation; The Desalination Device Using the Rising Liquid Film on the Microscale Fluted Surface of Horizontal Tubes
- Long-Range Air-Hole Assisted Subwavelength Waveguides: Towards Large-Scale Photonic IntegrationChapter 2: MEMS Design and Production; A Novel Filtering Method for the Random Drift of MEMS Gyroscope; Research on a Novel Compensation Algorithm for MEMS Sub-Pixel Displacement Measurement; The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-Type Electrothermal Actuator Based on MEMS; Theoretical Method Research on a MEMS Safety and Arming Device; Simulation Research on Micro-Milling Process Based on ABAQUS
- RF MEMS for Reconfigurable RF Front-End: Research in AustraliaDesign of Projection Lithography Objective Lens with Sub-Ten Micrometer Line-Width and its MTF Experimental Measurements; Keywords Index; Authors Index
- Notes:
- Description based upon print version of record.
- Includes bibliographical references at the end of each chapters and indexes.
- Description based on online resource; title from PDF title page (ebrary, viewed March 20, 2014).
- ISBN:
- 9783038264286
- 3038264288
- OCLC:
- 878138239
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