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Ion implantation and activation. Volume 2 / Kunihiro Suzuki.
- Format:
- Book
- Author/Creator:
- Suzuki, Kunihiro.
- Series:
- Ion Implantation and Activation
- Language:
- English
- Subjects (All):
- Ion implantation.
- Ion accelerators.
- Physical Description:
- 1 online resource (171 p.)
- Edition:
- 1st ed.
- Place of Publication:
- Sharjah : Bentham Science Publishers, 2013.
- Language Note:
- English
- Summary:
- Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories.Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory, Monte Carlo simulations, Edgeworth Polynomials and much more. This book provides advanced engineering and physics students and researchers with complete and coherent coverage of modern semiconductor process modeling.
- Contents:
- Cover; Title; EUL; Contents; Preface; Acknowledgement; Chapter 01; Chapter 02; Chapter 03; Chapter 04; Chapter 05; Chapter 06; Chapter 07; Chapter 08; Chapter 09; Index
- Notes:
- Description based upon print version of record.
- Includes bibliographical references and index.
- Description based on online resource; title from PDF title page (ebrary, viewed January 12, 2014).
- ISBN:
- 9781608057900
- 1608057909
- OCLC:
- 865331834
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