Micro/nano replication : processes and applications / Shinill Kang.

Format:

Book

Author/Creator:

Kang, Shinill.

Language:

English

Subjects (All):

Nanotechnology.

Manufacturing processes--Technological innovations.

Manufacturing processes.

Research, Industrial.

Physical Description:

1 online resource (385 p.)

Edition:

1st ed.

Place of Publication:

Hoboken, N.J. : Wiley, c2012.

Language Note:

English

Summary:

An introduction to micro and nano replication processes and applications Micro/Nano Replication: Processes and Applications provides an overview of the fundamentals, processes, and applications involved in micro and nano replication in the manuf

Contents:

MICRO/NANO REPLICATION: Processes and Applications; CONTENTS; Preface; 1. Introduction; 1.1 Introduction; 1.2 Micro/Nano Replication; 1.3 Application Fields of Micro/Nano Replicated Parts; 1.3.1 Optical Data Storage Devices; 1.3.2 Display Fields; 1.3.3 Other Industries; 1.4 Required Technologies for Micro/Nano Replication; References; 2. Patterning Technology for Micro/Nanomold Fabrication; 2.1 Material Removal Process; 2.1.1 Mechanical Machining; 2.1.2 Laser Ablation; 2.1.3 Silicon Etching Process; 2.1.4 Focused Ion Beam Patterning; 2.2 Lithography Process; 2.2.1 Electron Beam Lithography

2.2.2 Photolithography2.2.3 Reflow Method; 2.2.3.1 Fabrication of a Mother Lens; 2.2.3.2 Empirical Equation for the Volume Change Ratio of a Reflow Lens; 2.2.3.3 Verification of the Model; 2.2.4 Laser Interference Lithography; 2.2.4.1 Theory of Laser Interference Lithography; 2.2.4.2 Simulation of Laser Interference Lithography; 2.2.4.3 Experimental Setup; 2.2.4.4 Fabrication of Nanostructures Using Laser Interference Lithography under Different Process Conditions; 2.3 Electroforming Processes; 2.3.1 Theory of Electroforming Process; 2.3.2 Electroforming Results

2.3.2.1 Metallic Mold for a Microlens Array2.3.2.2 Metallic Mold for Patterned Media; References; 3. Modification of Mold Surface Properties; 3.1 Introduction; 3.2 Thiol-Based Self-Assembled Monolayer; 3.2.1 Thiol-Based Self-Assembled Monolayer and Deposition Process; 3.2.2 Experiment Results and Analysis; 3.2.3 The Changing Properties of SAM at Actual Replication Environment; 3.2.4 Analysis of Replicated Polymeric Patterns; 3.3 Silane-Based Self-Assembled Monolayer; 3.3.1 Silane-Based Self-Assembled Monolayer; 3.3.2 Deposition Process of Silane-Based Self-Assembled Monolayer

3.3.3 Self-Assembled Monolayer on Polymer Mold3.3.4 Analysis of Replicated Polymeric Patterns; 3.4 Dimethyldichlorosilane Self-Assembled Monolayer; References; 4. Micro/Nanoinjection Molding with an Intelligent Mold System; 4.1 Introduction; 4.2 Effects of the Mold Surface Temperature on Micro/Nanoinjection Molding; 4.3 Theoretical Analysis of Passive/Active Heating Methods for Controlling the Mold Surface Temperature; 4.3.1 Mathematical Modeling and Simulation; 4.3.2 Passive Heating; 4.3.3 Active Heating

4.4 Fabrication and Control of an Active Heating System Using an MEMS Heater and an RTD Sensor4.4.1 Construction of an Intelligent Mold System; 4.4.2 Control System for the Intelligent Mold System; 4.4.2.1 Kalman Filter Observer of the Thermal Plant; 4.4.2.2 LQGI Controller; 4.4.2.3 Performance of the Constructed Control System; 4.5 Replication of a High-Density Optical Disc Substrate Using the Intelligent Mold System; References; 5. Hot Embossing of Microstructured Surfaces and Thermal Nanoimprinting; 5.1 Introduction; 5.2 Development of Microcompression Molding Process

5.3 Temperature Dependence of Anti-Adhesion Between a Mold and the Polymer in Thermal Imprinting Processes

Notes:

Includes index.

ISBN:

9786613618917

9781280589089

1280589086

9781118146958

1118146956

9781118146965

1118146964

9781118146934

111814693X

OCLC:

782877168