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Semiconductor strain metrology : principles and applications / Terence K.S. Wong.
- Format:
- Book
- Author/Creator:
- Wong, Terence K. S.
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Materials.
- Semiconductors.
- Compound semiconductors--Design and construction--Materials.
- Compound semiconductors.
- Silicon-on-insulator technology.
- Physical Description:
- 1 online resource (141 p.)
- Edition:
- 1st ed.
- Place of Publication:
- [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]
- Language Note:
- English
- Summary:
- This book surveys the major and newly developed techniques for semiconductor strain metrology. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers.
- Contents:
- 01 Title.pdf; 02 Cover Page; 03 REVISED eBooks End User License Agreement-Website; 04 Dedication; 05 Content; 06 Foreword; 07 Preface; 08 Part 01; 09 Chapter 01; 10 Chapter 02; 11 Part 2; 12 Chapter 03; 13 Chapter 04; 14 Chapter 05; 15 Part 03; 16 Chapter 06; 17 Chapter 07; 18 Chapter 08; 19 Part 04; 20 Chapter 09; 21 Chapter 10; 22 Chapter 11; 23 Conclusion and Outlook; 24 Appendix; 25 Index
- Notes:
- Description based upon print version of record.
- Includes bibliographical references and index.
- OCLC:
- 806204694
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