Practical guide to RF-MEMS / Jacopo Iannacci.

Format:

Book

Author/Creator:

Iannacci, Jacopo.

Language:

German

Subjects (All):

Wireless communication systems--Equipment and supplies.

Wireless communication systems.

Radio circuits.

Microelectromechanical systems.

Physical Description:

1 online resource (362 p.)

Edition:

1st ed.

Place of Publication:

Weinheim : Wiley-VCH Verlag GmbH & Co. KGaA, 2013.

Language Note:

German

Summary:

Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement

Contents:

Practical Guide to RF-MEMS; Contents; Foreword; Preface; 1 RF-MEMS Applications and the State of the Art; 1.1 Introduction; 1.2 A Brief History of MEMS and RF-MEMS from the Perspective of Technology; 1.3 RF-MEMS Lumped Components; 1.3.1 Variable Capacitors; 1.3.2 Inductors; 1.3.3 Ohmic and Capacitive Switches; 1.4 RF-MEMS Complex Networks; 1.4.1 Reconfigurable Impedance-Matching Networks; 1.4.2 Reconfigurable RF Power Attenuators; 1.4.3 Reconfigurable Phase Shifters and Delay Lines; 1.4.4 Reconfigurable Switching Matrices; 1.5 Modeling and Simulation of RF-MEMS Devices

1.5.1 The Finite Element Method Approach1.5.2 Compact Modeling of RF-MEMS; 1.5.3 Mixed-Domain Electromechanical Simulation Environment; 1.6 Packaging of RF-MEMS; 1.7 Brief Overview of Exploitation of RF-MEMS in RF Systems; 1.8 Conclusions; 2 The Book in Brief; 2.1 Introduction; 2.2 A Brief Introduction to the FBK RF-MEMS Technology; 2.3 An RF-MEMS Series Ohmic Switch (Dev A); 2.4 RF-MEMS Capacitive Switches/Varactors; 2.4.1 Design 1 (Dev B1); 2.4.2 Design 2 (Dev B2); 2.4.3 RF-MEMS Ohmic Switch with Microheaters (Dev C); 2.4.4 MEMS-Based Reconfigurable RF Power Attenuator (Dev D)

2.4.5 MEMS-Based Reconfigurable Impedance-Matching Network (Dev E)2.5 Conclusions; 3 Design; 3.1 Introduction; 3.2 Design Rules of the Fondazione Bruno Kessler RF-MEMS Technology; 3.3 Design of an RF-MEMS Series Ohmic Switch (Dev A); 3.4 Generation of 3D Models Starting from the 2D Layout; 3.5 Conclusions; 4 Simulation Techniques (Commercial Tools); 4.1 Introduction; 4.2 Static Coupled Electromechanical Simulation of the RF-MEMS Ohmic Switch (Dev A) in ANSYS MultiphysicsTM; 4.2.1 Block 1: Definition of the Geometry and Properties of the Material; 4.2.2 Block 2: Meshing of the Structure

4.2.3 Block 3: Generation of the Elements for the Electromechanical Coupling4.2.4 Block 4: Definition of the Mechanical Boundary Conditions; 4.2.5 Block 5: Definition of the Simulation; 4.2.6 Block 6: Simulation Execution; 4.2.7 Block 7: Postprocessing and Visualization of Results; 4.3 Modal Analysis of the RF-MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics; 4.4 Coupled Thermoelectromechanical Simulation of the RF-MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics; 4.5 RF Simulation (S-parameters) of the RF-MEMS Variable Capacitor (Dev B1) in ANSYS HFSSTM; 4.6 Conclusions

5 On-Purpose Simulation Tools5.1 Introduction; 5.2 MEMS Compact Model Library; 5.2.1 Suspended Rigid Plate Electromechanical Transducer; 5.2.2 Flexible Beam; 5.2.3 Simulation Validation of a MEMS Toggle Switch; 5.3 A Hybrid RF-MEMS/CMOS VCO; 5.4 Excerpts of Verilog-A Code Implemented for MEMS Models; 5.4.1 Anchor Point; 5.4.2 Force Source; 5.4.3 Flexible Beam; 5.5 Conclusions; 6 Packaging and Integration; 6.1 Introduction; 6.2 A WLP Solution for RF-MEMS Devices and Networks; 6.2.1 Package Fabrication Process; 6.2.2 Wafer-to-Wafer Bonding Solutions; 6.3 Encapsulation of RF-MEMS Devices

6.3.1 The Issue of Wafer-to-Wafer Alignment

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

ISBN:

9783527673940

3527673946

9783527680856

3527680853

9783527673926

352767392X

OCLC:

856625964