Micro and nanomanufacturing research / J. Paulo Davim, editor.

Format:

Book

Contributor:

Davim, J. Paulo.

Series:

Materials and manufacturing technology series.

Materials and manufacturing technology

Language:

English

Subjects (All):

Micromachining.

Nanomanufacturing.

Physical Description:

1 online resource (210 p.)

Edition:

1st ed.

Place of Publication:

New York : Nova Science Publishers, c2010.

Language Note:

English

Summary:

Reviews research developments in micro and nanomanufacturing, such as manufacturing and fabrication techniques in nano, micro and meso scales, micro scale metal cutting, micro and nano abrasive machining, laser micro-machining; micro EDM, and, micro forming processes and lithographyc processes.

Contents:

Intro

MICRO AND NANOMANUFACTURING RESEARCH

Contents

Preface

Micromanufacturing Using X-ray Lithographic Technologies

Abstract

1. Introduction

2. X-RAY Lithography

3. Synchrotron Radiation (SR)

3.1. General Characteristics

3.2. Spectral Characteristics

3.3. Spectral Brilliance and Brightness

4. Microfabrication Process

4.1. General

4.2. LIGA Process

4.3. Lithography Steps

4.4. X-ray Lithography

4.4.1. X-Ray Masks

4.4.2. Mask Materials

4.4.3. Single-layer Absorber Fabrication

4.4.4. Alignment of X-Ray Mask

4.4.5. Masks for High-Aspect-Ratio Microlithography

4.4.6. Choice of Resist Substrate

4.4.7. Resist Requirements

4.4.8. Methods of Resist Application

Multiple Spin Coats

Commercial PMMA Sheets

Casting of PMMA

Resist Adhesion

Stress-Induced Cracks in PMMA

4.4.9. Exposure

Optimal Wavelength

4.4.10. Deposited Dose

4.4.11. Stepped and Slanted Microstructures

4.4.12. Master Micromold Fabrication Methods

5. Conclusions

References

Mechanistic Modeling Approach for Micro Milling Cutting Forces

Nomenclature

2. Mechanistic Cutting Force Model

2.1. Chip Thickness Modeling

2.2. Force Model Development in the Ploughing Dominant Regime

2.3. Force Model Development in the Shearing Dominant Regime

3. Experimental Setup

4. Calibration and Parameter Estimation

5. Model Validation

4. Discussions

5. Conclusion

A Study on Surface Quality in Micromilling

2. Experimental Procedure

2.1. CAD/CAM Software

2. Experimental Setup

2.3. Workpiece Material

2.4. Cutting Parameters / Machining Strategies

2. Surface Quality Characterization

3. Results and Discussion

4. Conclusions

Acknowledgments.

References

Numerical Simulation and Experimental Validation when Precision Radial Turning AISI 1045 Steel

3. Finite Elements Analysis

4. Results and Discussion

4.1. Cutting and Thrust Forces

4.2. Cutting Temperature

4.3. Plastic Strain

Acknowledgments

The Effect of Cutting Speed on Cutting Forces and Surface Finish when Micro-turning Polyamides

Introduction

4. Conclusion

Pulsed Droplet Micromachining of Abrasive Materials

2. Pulsed Droplet Impact

3. Water Droplet Impact

3.1. Circumferential Damage

3.2. Lateral Jet Formations

4. Machining Threshold Modelling

4.1. Machining Threshold Model

4.2. Quasi-static Stress Intensity

4.3. Dynamic Stress Intensity Factor

4.4. Simulation of Liquid Droplet Micromachining

4.5. Machining Threshold Curves

5. Micromachining Results

5.1. Silicon Carbide

5.2 .Alumina

5.3. Magnesium Fluoride

6. Material Removal Rates

7. Design of Machine Tools for Liquid Droplet Micromachining

8. Analysis of Space Frame

8.1. Finite Element Model

8.2. Closed-form Solution Model

9. Mode shapes of Tetrahedral Structures

9.1. Experimental Method

9.2. Experimental Procedure

9.3. Experimental Analysis

10. Discussion and Conclusions

Some Aspects of Non-conventional Micro Machining Technology: An Overview

2. Micro Electrochemical Machining (Micro ECM)

2.1. Micro ECM Techniques

2.1.1. Micro ECM through-Maskless

2.1.2. Micro ECM through-Mask

2.2. Micro ECM Applications

2.2.1. Fabrication of Microelectronic Components

2.2.2. Ink-jet Nozzle Plates.

2.2.3. Metal Masks

2.2.4. Micro Hole Drilling

2.2.5. Micro Surface Production

3. Micro Electrodischarge Machining (Micro EDM)

3.1. Micro EDM Techniques

3.2. Micro EDM Applications

3.2.1. Micro EDM of Ceramics

3.2.2. Micro Electrodes for EDM and Micro-Pins

3.2.3. Ink-Jet Nozzle

3.2.4. Micro Hole Drilling

3.2.5. Micro Surface Production

4. Micro Laser Machining (Micro LM)

4.1. Micro LM Techniques

4.1.1. Mask Projection Technique

4.1.2. Direct Writing Technique

4.2. Micro LM Applications

4.2.1. Micro Machining of Electrostatic Electron Lenses

4.2.2. Micro Hole Drilling

4.2.3. Manufacturing of 3D Structures

5. Micro Ultrasonic Machining (Micro USM)

5.1. Micro USM Tools

5.2. Micro USM Applications

5.2.1. Micro Hole Drilling

5.2.2. Manufacturing of 3D Structures

7. Summary and Conclusions

Manufacturing and Application of Micro/Nano Fluidic Devices

1. Micro/nano Fluidic Components

1.1. Nanochannels

1.2. Micromixers

1.3. Micropumps

1.4. Microvalves

2. Material and Manufacturing Techniques

2.1. Silicon and Glass

2.2. Polydimethylsiloxane

2.3. Thermoplastic Polymer

3. Micro/nano Manufacturing of Thermoplastics-based Lab-on-a-chip

3.1. Micro/nano Machining Process

3.1.1. Master Fabrication

3.1.2. Hot Embossing

3.1.3. Micro-injection Molding

3.1.4. Electrode Integration

3.1.5. Thermal Bonding

3.2. Automatic Manufacturing Equipment

4. Development of Liquid-feed Micro Direct Methanol Fuel Cells on Silicon Substrate and Metal Foil Using Microfabrication

4.1. Introduction

4.2. Silicon Micromachining for μDMFC

4.2.1. Design of the Silicon μDMFC Demonstrator

4.2.2. Microfabrication of Silicon Polar Plates

4.2.3. Packaging and Test of the Silicon μDMFC.

4.3. Micro Photochemical Etching (μPCE) of the Stainless Steel Polar Plates

4.3.1. Fundamental of μPCE Accuracy Control

4.3.2. Experiments

4.3.3. Fabricate (DMFC with Taper Flow Channel Using (PCE

Index.

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

Description based on print version record and cip data provided by publisher.

ISBN:

1-61324-366-9

OCLC:

705944505