Scanning electron microscope optics and spectrometers / Anjam Khursheed.

Format:

Book

Author/Creator:

Khursheed, Anjam.

Language:

English

Subjects (All):

Scanning electron microscopes.

Optical spectrometers.

Physical Description:

1 online resource (400 p.)

Edition:

1st ed.

Place of Publication:

Singapore ; Hackensack, N.J. : World Scientific Pub. Co., 2011.

Language Note:

English

Summary:

This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engi

Contents:

Dedication; Preface; Contents; Chapter 1 Conventional SEM Design; Chapter 2 Spectrometer Design Principles; Chapter 3 In-lens Improvements; Chapter 4 Sub-nanometer Probe Diameters; Chapter 5 Secondary Electron Spectrometers; Chapter 6 Full Range Deflector Spectrometer Designs; Chapter 7 Full Range Parallel Energy Spectrometer Designs; Chapter 8 Spectroscopic SEM proposals; Appendix 1.0 Field Expansions; Appendix 1.1 Derivation of the Paraxial Equation; Appendix 1.2 Spherical Aberration; Appendix 1.3 Chromatic Aberration; Appendix 2 Multipole Lenses; Bibliography; Index

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

ISBN:

9786613143556

9781283143554

1283143550

9789812836687

9812836683

OCLC:

738433338