Introduction to microfabrication / Sami Franssila.

Format:

Book

Author/Creator:

Franssila, Sami.

Language:

English

Subjects (All):

Microelectromechanical systems.

Electronic apparatus and appliances.

Microfabrication.

Physical Description:

1 online resource (536 pages)

Edition:

2nd ed.

Place of Publication:

Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.

Language Note:

English

Summary:

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes:expanded sections on MEMS

Contents:

Introduction to Microfabrication; Contents; Preface to the First Edition; Preface to the Second Edition; Acknowledgements; 1 Introduction; 2 Micrometrology and Materials Characterization; 3 Simulation of Microfabrication Processes; 4 Silicon; 5 Thin-Film Materials and Processes; 6 Epitaxy; 7 Advanced Thin Films; 8 Pattern Generation; 9 Optical Lithography; 10 Advanced Lithography; 11 Etching; 12 Wafer Cleaning and Surface Preparation; 13 Thermal Oxidation; 14 Diffusion; 15 Ion Implantation; 16 CMP: Chemical-Mechanical Polishing; 17 Bonding; 18 Polymer Microprocessing; 19 Glass Microprocessing

20 Anisotropic Wet Etching21 Deep Reactive Ion Etching; 22 Wafer Engineering; 23 Special Processes and Materials; 24 Serial Microprocessing; 25 Process Integration; 26 MOS Transistor Fabrication; 27 Bipolar Transistors; 28 Multilevel Metallization; 29 Surface Micromachining; 30 MEMS Process Integration; 31 Process Equipment; 32 Equipment for Hot Processes; 33 Vacuum and Plasmas; 34 CVD and Epitaxy Equipment; 35 Cleanrooms; 36 Yield and Reliability; 37 Economics of Microfabrication; 38 Moore's Law and Scaling Trends; 39 Microfabrication at Large; Appendix A Properties of Silicon

Appendix B Constants and Conversion FactorsAppendix C Oxide and Nitride Thickness by Color; Index

Notes:

Includes index.

ISBN:

9786612777066

9781119991892

1119991897

9781282777064

1282777068

9780470666722

0470666722

9781119990413

1119990416

OCLC:

689995003