5 options
Microfabrication for microfluidics / Sang-Joon John Lee, Narayan Sundararajan.
- Format:
- Book
- Author/Creator:
- Lee, Sang-Joon John.
- Series:
- Artech House integrated microsystems series.
- Integrated microsystems series
- Language:
- English
- Subjects (All):
- Microfluidics.
- Microfabrication.
- Physical Description:
- 1 online resource (276 p.)
- Edition:
- 1st ed.
- Place of Publication:
- Boston : Artech House, 2010.
- Language Note:
- English
- Summary:
- Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the fabricated structures as they are applied to microfluidic sensor and actuator functions. You find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons.
- Contents:
- Microfabrication for Microfluidics; Contents; Preface; Chapter 1 Introduction; Chapter 2 Geometric Features; Chapter 3 Materials for Microfluidic Devices; Chapter 4 Photolithography; Chapter 5 Solidification Processes and Soft Lithography; Chapter 6 Subtractive Processes; Chapter 7 Additive Processes; Chapter 8 Fugitive and Sacrificial Release Processes; Chapter 9 Substrate Bonding and Fluidic Interfacing; Chapter 10 Functional Domains and System Integration; List of Acronyms and Abbreviations; About the Authors; Index.
- Notes:
- Description based upon print version of record.
- Print version record.
- Includes bibliographical references and index.
- ISBN:
- 1-5231-1741-9
- 1-59693-472-7
- OCLC:
- 659579793
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.