FBAR, MEMS and NEMS resonator design and applications / Humberto Campanella.

Format:

Book

Author/Creator:

Campanella, Humberto.

Series:

Artech House integrated microsystems series.

Integrated microsystems series

Language:

English

Subjects (All):

Acoustic surface wave devices.

Electric resonators.

Physical Description:

1 online resource (363 p.)

Edition:

1st ed.

Place of Publication:

Boston : Artech House, c2010.

Language Note:

English

Summary:

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.

Contents:

1. MEMs and NEMs resonator technologies

2. Acoustic microresonator technologies

3. Design and modeling of micro- and nanoresonators

4. Fabrication techniques

5. Characterization techniques

6. Performance optimization

7. Integration of resonator to CMOS technologies

8. Sensor applications

9. Radio frequency applications

10. Case studies.

Notes:

Print version record.

Includes bibliographical references and index.

Includes index.

ISBN:

9781607839781

1607839784

OCLC:

659579814