Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.

Format:

Book

Contributor:

Hoffman, Dorothy M., -1996.

Singh, Bawa.

Thomas, John H.

Language:

English

Subjects (All):

Vacuum technology--Handbooks, manuals, etc.

Vacuum technology.

Mechanical engineering.

Physical Description:

1 online resource (861 p.)

Edition:

1st ed.

Place of Publication:

San Diego, CA : Academic Press, c1998.

Language Note:

English

Summary:

The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner.Key Features* User oriented with man

Contents:

Front Cover; HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY; Copyright Page; Contents; Preface; List of Contributors; Part 1: Fundamentals of Vacuum Technology and Surface Physics; Chapter 1.1. Vacuum Nomenclature and Definitions; 1.1.1 Basic Definition; 1.1.2 Pressure Regions of Vacuum; Chapter 1.2. Gas Properties; 1.2.1 Description of Vacuum as a Low-Pressure Gas; 1.2.2 Characteristics of a Gas-Basic Definitions; 1.2.3 Gas Laws; Chapter 1.3. Molecular Processes and Kinetic Theory; 1.3.1 General Description; 1.3.2 Molecular Motion; 1.3.3 Kinetic Theory Derivation of the Gas Laws; 1.3.4 Pressure

1.3.5 Molecular Mean Free Path1.3.6 Number of Impacts with the Chamber Wall; 1.3.7 Time to Form a Monolayer; 1.3.8 Thermal Transpiration; 1.3.9 Coefficient of Thermal Conductivity; 1.3.10 Coefficient of Diffusion; Chapter 1.4. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate; Chapter 1.5. Gas Flow; 1.5.1 Nature of Gas Flow; 1.5.2 Turbulent Flow; 1.5.3 Viscous, Streamline, or Laminar Flow; 1.5.4 Molecular Flow; 1.5.5 Flow Relationships; Chapter 1.6. Conductance; 1.6.1 Conductance; 1.6.2 Conductances in Parallel; 1.6.3 Conductances in Series

Chapter 1.7. Flow Calculations1.7.1 Equations for Viscous Flow; 1.7.2 Equations for Molecular Flow; 1.7.3 Knudsen's Formulation; 1.7.4 Clausing Factors; Chapter 1.8. Surface Physics and Its Relation to Vacuum Science; 1.8.1 Physical Adsorption or ""Adsorption""; 1.8.2 Chemisorption; 1.8.3 Sticking Coefficient; 1.8.4 Surface Area; 1.8.5 Surface Adsorption Isotherms; 1.8.6 Capillary Action; 1.8.7 Condensation; 1.8.8 Desorption Phenomena; 1.8.9 Thermal Desorption; 1.8.10 Photoactivation; 1.8.11 Ultrasonic Desorption; 1.8.12 Electron- and Ion-Stimulated Desorption

1.8.13 Gas Release from SurfacesReferences; Part 2: Creation of Vacuum; Chapter 2.1. Technology of Vacuum Pumps - An Overview; 2.1.1 Vacuum Pump Function Basics; 2.1.2 Gas Transport: Throughput; 2.1.3 Performance Parameters; 2.1.4 Pumping Speed; 2.1.5 Pumpdown Time; 2.1.6 Ultimate Pressure; 2.1.7 Forevacuum and High-Vacuum Pumping; 2.1.8 Pump System Relationships; 2.1.9 Crossover from Rough to High-Vacuum Pumps; 2.1.10 Pumping System Design; References; Chapter 2.2. Diaphragm Pumps; 2.2.1 Introduction: Basics and Operating Principle; 2.2.2 State-of-the-Art Design and Manufacturing

2.2.3 Performance and Technical Data2.2.4 Modular Concept for Specific Application Setups: Standalone Operation; 2.2.5 Diaphragm Pumps as Backing and Auxiliary Pumps in Vacuum Systems; References; Chapter 2.3. Vacuum Blowers; 2.3.1 Introduction; 2.3.2 Equipment Description; 2.3.3 Blower Operating Principle; 2.3.4 Blower Pumping Efficiency; 2.3.5 Blower Pumping Speed Calculations; 2.3.6 Power Requirements; 2.3.7 Temperature Considerations; 2.3.8 Flow and Compression Ratio Control Mechanisms; 2.3.9 Liquid-Sealed Blowers; 2.3.10 Selected System Arrangements

Chapter 2.4. Vacuum Jet Pumps (Diffusion Pumps)

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

ISBN:

1-281-05935-8

9786611059354

0-08-053375-2

OCLC:

476112974