Introduction to microelectromechanical microwave systems / Hector J. de los Santos.

Format:

Book

Author/Creator:

Santos, Héctor J. de los.

Series:

Microelectromechanical systems series.

Artech House MEMS and sensors library

Language:

English

Subjects (All):

Microwave devices.

Microelectromechanical systems.

Physical Description:

1 online resource (235 p.)

Edition:

2nd ed.

Place of Publication:

Boston : Artech House, c2004.

Language Note:

English

System Details:

data file

Summary:

Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.

Contents:

Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213

Notes:

Description based upon print version of record.

Print version record.

Includes bibliographical references and index.

ISBN:

1-58053-872-X

OCLC:

63045717